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Teltec Pacific is a technical Sales and Service organisation serving the Semiconductor, Photonics and Optoelectronics Industries in Asia Pacific countries.

Trymax - Dry Plasma Ash & Etch Equipment

Trymax

Dry Plasma Ash & Etch Equipment
 

 

NEO200A Series
● Handling
   - Dual Cassette
   - 3 axis robot

● Chammber Configurations
   - RF Only (13.56MHz)
   - Microwave Only (2.45GHz)
   - Dual Source RF / MW
   - DCP (13.56MHz)

● 100 to 200mm compatible

 

 

NEO300A Series
● Handling
   - Single Loadport (300mm)
   - 3 axis robot

● Chammber Configurations
   - RF Only (13.56MHz)
   - Microwave Only (2.45GHz)
   - Dual Source RF / MW
   - DCP (13.56MHz)

● 200 to 300mm compatible

 

 

NEO3400 Series
● Handling
   - up to 4 Loadports (300mm)
   - 4 axis robot with X-traverser

● Chammber Configurations
   - RF Only (13.56MHz)
   - Microwave Only (2.45GHz)
   - Dual Source RF / MW
   - DCP (13.56MHz)

● 200 to 300mm compatible