Teltec Pacific is a technical Sales and Service organisation serving the Semiconductor, Photonics and Optoelectronics Industries in Asia Pacific countries.

OAI - Mask Aligners & Exposure Systems

OAI is a leading manufacturer of reliable, precision equipment for MEMS, semiconductors, nanotechnology, cleanroom automation, and for UV light measurement. With products installed worldwide, OAI systems are used for both R&D and production of semiconductors, MEMS and microfluidic devices. From mask aligners and UV light sources to UV power meters, OAI is a leader in the industry for over 40 years.

MEMS &Microfluidics Products : 

Mask Aligners       


  OAI Series 6000 Productions Mask Aligners 

For: Semiconductors, MEMS, Sensors, Microfluidics, IOT, Packaging

With over 4 decades of manufacturing in the semiconductor industry, OAI meets the growing challenge of a dynamic market with a new elite class of production photolithography equipment. Built on the venerable OAI modular platform, the Series 6000 is a fully automated cassette to cassette system with sub-micron resolution which delivers performance that is unmatched at any price. The aligners have ±3% uniformity and a throughput of 180 wafer per hour in first mask mode, which results in higher yields. The Series 6000 can handle a wide variety of wafers from thick and bonded substrates (up to 7000 microns), warped wafers (up to 7 mm-10 mm), thin substrates (down to 100 micron thick), and thick photo resist. With subperb process repeatability, the Series 6000 is the perfect solution for all production environments. Choose either top side or optional back side alignment which uses OAI's customized pattern assist software that is Cognex based. For the total lithography process, the Series 6000 can be integrated seamlessly with cluster tools. OAI's new production mask aligners are the total package.