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Photon Emission Microscopes
Checkpoint Technologies, LLC USA
Checkpoint is the worlds leading supplier of Laser Scanning Microscope based equipment for the semiconductor industry. Checkpoint's tools are used in various applications in semiconductor failure analysis and debugging techniques. Some of the techniques that are supported by Checkpoint's tools are – TIVA, LIVA, OBIC, OBIRCH, SDL, LADA as well as Laser Probing.
Checkpoint Technologies’ laser probing tool, the InfraScan™ Laser Timing Module (LTM), employs a cw laser to optically probe circuit node to produce electronic waveforms. Checkpoint Technologies’ stabilized laser source and optical-to-electronic conversion module provides high bandwidth optical probing up to 12 GHz.
The LTM can be integrated into an existing InfraScan™ product such as an INV or TDE or installed as a stand alone system. The LTM option does not affect the ability of an INV or TDE to perform PEM and LSM studies on your samples.
The InfraScanTM ES400 family provides the groundbreaking combination of Checkpoint Technologies, world leading laser scanning microscope and its best in class emission system into a single tool. This combination tool allows Checkpoint customers to configure the tool with either laser scanning only, emission only or the combination of the two. Best of all, the upgrade path to a complete combination tool is easy for future expansion at the customer’s site. Lastly, the ES400 can be fitted with Checkpoint’s proprietary industry leading Solid Immersion Lens objective.
The InfraScanTM 400TDM is the newest evolution of Checkpoint’s pioneering top-down laser scanning and emission tools. This tool is specifically designed to accommodate any commercially available probe station, up to 300 mm wafers. The combination of Checkpoint Technologies, world leading laser scanning microscope and its best in class emission system into a single tool, gives users the most sensitive and easy to use system on the market. The TDM can be configured with up to 3 lasers and a choice of InGaAs, MCT or Si CCD emission cameras.
Checkpoint Technologies designs and builds it own Solid Immersion Lens (SIL) objectives. The SIL’s provide our customers with state of the art image resolution for backside IC imaging. Checkpoint’s SIL objectives integrate seamlessly into any InfraScan™ system and increase your ability to resolve the finest structure in state of the art IC’s.
Checkpoint’s ASP-1000 is the most sensitive source/amplifier designed for Laser Based Defect Localization. The ASP-1000 is controlled via standard RS-232 computer interface. The computer controls include constant current and constant voltage modes, as well as bandwidth filters to optimize your detection parameters. Multiple ASP-1000’s can be used simultaneously giving greater flexibility to your laser-based setup.
SLS-1000 Laser Module
Checkpoint’s SLS-1000 Laser Module is designed for Laser Based Defect Localization applications. The SLS-1000 provides a fiber coupled, polarization maintaining laser beam that is easily coupled into a scanning module. The SLS-1000 has single lasers with wavelengths of 1064 nm, 1340 nm and 532 nm with powers up to 1 W, for 1064 and 1340 nm and 100 mW for 532 nm.
DLS-1000 Laser Module
Checkpoint’s DLS-1000 Laser Module is designed for Laser Based Defect Localization applications. The DLS-1000 provides a fiber coupled, polarization maintaining laser beam that is easily coupled into a scanning module The DLS-1000 is equipped with both 1064 nm and 1340 nm lasers, with powers up to 1 W.