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Teltec Pacific is a technical Sales and Service organisation serving the Semiconductor, Photonics and Optoelectronics Industries in Asia Pacific countries.

Photolighography / Coating

Denton Vacuum located in Philadelphia, USA, is a world-renowned vacuum coating equipment manufacturers. Since 1964, Denton has custom-made thousand sets of evaporation, sputtering and PECVD coating systems, with unique specifications for her customers. Denton’s customers include leading industrial companies as well as most leading universities and research facilities worldwide.

Explorer THIN FILM DEPOSITION PLATFORM


Denton’s most popular, flexible system, the high vacuum EXPLORER can be equipped for thermal evaporation, e-beam evaporation, sputtering, or even PECVD in order to perform research, development and production.

 

TYPICAL APPLICATIONS :
- PECVD

• Materials Research
• Small Batch Systems
• 3D Objects
• Coat a Variety of Materials

 


- SPUTTERING
• Materials research
• Product QC & QA
• Semiconductor Failure Analysis
• CD Mastering
• Nanotechnology
• Compound Semiconductors
• OLEDs

- EVAPORATION
• Materials Research
• Ion Assisted Deposition (IAD)
• Medical Devices
• Telecommunications
• CD Mastering
• Lift-Off
• Protective Coating

 

CAPABILITIES & FEATURES :
• Thermal & E-Beam Evaporation
• Ion Beam Assisted Deposition
• DC/Pulse DC/RF Sputtering & Co-sputtering
• Base Vacuum in the 10-6 torr scale range
• 8" (200 mm) Substrate Size or Larger
• Load Lock Option
• PECVD Process Options

 

DV-502 HIGH VACUUM EVAPORATOR PLATFORM

 

 

With rapid cycle times, on-board deposition control and a large deposition zone, the DV-502 gives users a flexible, high vacuum evaporation or sputtering system equipped for a wide range of applications.

 

TYPICAL APPLICATIONS :
- EVAPORATION

• High vacuum carbon coating for 

     TEM & X-ray analysis
• Carbon support films
• Carbon platinum replicas
• Aperture cleaning
• Rotary shadowing
• Asbestos analysis
• Resistance evaporation
• Failure analysis
• High purity ultra thin films

 

CAPABILITIES & FEATURES :
• High Vaccum Gate Valve for Rapid Cycling
• Diffusion or Turbo-moloecular Pump Options
• Dedicated Sputtering or Evaporation Capability
• Integrated Thickness Monitors and Controllers
• AC Glow for Sample CLeaning
• Base Vacuum in the 10-6 torr scale range
• 6" (150 mm) Diameter Substrate Size

 

Desktop Pro COMPACT, HIGH PERFORMANCE SPUTTERING PLATFORM

 

 

With two sputtering cathodes and a turbo-molecular pump, the DESKTOP PRO is a compact, high vacuum platform for research, production support and sample preparation.

 

TYPICAL APPLICATIONS :
- SPUTTERING

• Materials Research
• Product QC & QA
• Semiconductor failure analysis
• Nanotechnology
• Compound semiconductors

CAPABILITIES & FEATURES :
• DC and RF Sputtering
• One or Two Cathode Configuration
• Co-sputtering Capable
• Base Vacuum in the 10-6 torr scale range
• 6” (150 mm) Diameter Substrate Size

 

Desk V HP COLD SPUTTERING PLATFORM

 

 

A sputtering system that can be also equipped for carbon evaporation, the DESK V HP is the global standard for electron microscopy sample preparation. The DESK V Series includes standard systems, high power systems and turbo pumping systems.

 

TYPICAL APPLICATIONS :
- SPUTTERING

• Iridium coating capabilities
• TEM sample preparation
• SEM sample preparation
• Field emission (FE) SEM sample

     preparation

CAPABILITIES & FEATURES :
• DC Sputtering
• Carbon Evaporation
• 4” (100 mm) Diameter Substrate Size